FLAW DETECTING METHOD OF TRANSPARENT PLATE-SHAPED BODY AND FLAW DETECTOR THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a flaw detecting method of a transparent plate-shaped body constituted so as to be capable of detecting only the surface flaw of the transparent plate-shaped body, and a flaw detector therefor.;SOLUTION: The flaw detector 1 is equipped with a luminaire 4 for obliquely irradiating the front 3a of a transparent glass substrate 3 with linear illumination light 2, a line sensor 5 for detecting the linear illumination light 2 regularly reflected by the front 3a, an image processing device 6, a display device 7 and shield plates 8-10. The flaw present in the transparent glass substrate 3 is detected on the basis of the output of the line sensor 5. The width of the linear illumination light 2 is adjusted by the first and second shield plates 8 and 9 so as to separate the linear surface reflected light 2A formed by regularly reflecting the linear illumination light 2 by the front 3a of the transparent glass substrate 3 and the linear rear reflected light 2B formed by regularly reflecting the linear illumination light 2 by the rear 3b of the transparent glass substrate 3 and linear surface reflected light 2A is detected by the line sensor 5.;COPYRIGHT: (C)2005,JPO&NCIPI