Electrolytic polishing method and apparatus for using the same in the transmission electron microscopy specimen preparation

摘要

PROBLEM TO BE SOLVED: To prevent the formation of deposits on the surface of a sample.;SOLUTION: In an electrolytic grinding apparatus equipped with a sample 2 for a transmission electron microscope, the electrodes 3 opposed to the sample 2, a grinding fluid supply means 5 for supplying a grinding fluid 4 to the gaps between the sample 2 and the electrodes 3, an applying means 6 for applying voltage across the sample 2 and the electrodes 3 to grind the sample 2 and a detection means 7 for detecting that the sample 2 becomes predetermined thickness by grinding to stop the grinding fluid supply means 5 and the applying means 6, a bias voltage applying means 8 for applying bias voltage across the sample 2 and the electrodes 3 immediately after the detection means 7 detects that the sample 2 becomes predetermined thickness and a washing liquid supply means 10 for supplying a cleaning fluid 9 to the sample 2 immediately after detection to wash the same are provided.;COPYRIGHT: (C)2001,JPO