Sputtered multilayer magnetic recording media with ultra-high coercivity

摘要

Improved multilayer magnetic superlattice structures, such as (Co/Pt)_n and (C0/Pd)_n, having perpendicular magnetic coercivities as high as about 10,000 Oe, are formed by sputtering in Kr and/or Xe atmospheres at relatively high power densities and relatively small target-to-substrate spacings. The magnetic superlattice structures are advantageously utilized in the formation of the thermally stable, perpendicular magnetic recording media having ultra-high areal recording densities of from about 100 Gbit/in² to about 600 Gbit/in².