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Novel tertiary (meth)acrylates having lactone structure, polymers, resist compositions and patterning process
Novel tertiary (meth)acrylates having lactone structure, polymers, resist compositions and patterning process
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机译:具有内酯结构的新型(甲基)丙烯酸叔丁酯,聚合物,抗蚀剂组合物和图案化工艺
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摘要
Novel tertiary (meth)acrylate compounds having a lactone structure are polymerizable into polymers having improved transparency, especially at the exposure wavelength of an excimer laser and dry etching resistance. Resist compositions comprising the polymers are sensitive to high-energy radiation, have a high resolution, and lend themselves to micropatterning with electron beams or deep-UV rays.
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