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Window for allowing end point of etching process to be detected and etching device comprising the same
Window for allowing end point of etching process to be detected and etching device comprising the same
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机译:用于检测蚀刻过程的终点的窗口以及包括该窗口的蚀刻装置
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摘要
An end point detection window prevents process failures in a plasma etching device. The end point detection window has a body of aluminum or an aluminum alloy through which a hole extends to provide a path along which light generated during the etching process can pass from the process chamber, and a capping section coupled to a light outlet of the body. The capping section is of quartz for allowing the light passing through the hole in the body to be transmitted out of the process chamber.
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