TRANSFER SYSTEM FOR SUPPORTING ETCH CHAMBER IRRESPECTIVE OF SEVERANCE OF WIRE FOR ELEVATING ETCH CHAMBER IN ETCHING PROCESS

摘要

PURPOSE: A transfer system of an etch chamber is provided to support the etch chamber irrespective of severance of elevating wires by using an auxiliary wire as well as the elevating wires. CONSTITUTION: A chamber supporting plate(200) is located on a chamber and includes a plurality of fixing holes which are connected to a chamber supporting wire, an elevating wire, and an auxiliary wire. An elevation device includes a plurality of motors(M1,M3) installed at an upper part of the chamber supporting plate, a driving gear coupled to a driving shaft of each of the motors, a first driven gear coupled to the driving gear, a plurality of bobbins, a first rotary shaft, a first driven shaft gear, a second driven gear coupled to the first driven shaft gear, a second rotary shaft, and a bracket installed at a lower part of a base panel. A horizontal moving device(300) includes an X-axis transfer shaft(310) and a Y-axis transfer shaft(320). A supporting frame is used for supporting the horizontal moving device.