APPARATUS AND METHOD FOR TILT-TRANSFERRING OF SUBSTRATE, AND TREATMENT THEREOF USING THE SAME TO REMOVE PARTICLES ON SUBSTRATE BY TRANSFERRING SUBSTRATE OBLIQUELY

摘要

PURPOSE: A tilt-transferring apparatus of a substrate is provided to remove particles on the substrate and to prevent the breakage of the substrate by transferring the substrate obliquely. CONSTITUTION: A tilt-transferring apparatus of a substrate(I) includes a frame, a pair of upper hands(15), a lower hand(42), a tilting unit(40) and transfer units. The substrate attached to the frame is transferred by the pair of upper hands. The lower hand attached to the frame receives/gives the substrate from/to the pair of upper hands. The tilting unit receives the substrate obliquely. The transfer unit obliquely receives/gives the substrate from/to the tilting unit. The pair of upper hands comprise a first and a second hand(6,8) that are opposed each other. The first and second hand are respectively divided into a horizontal part(19) and a vertical part(21).