Method for reducing gas load of substrate carriers with vacuum processes, comprises repeatedly equipping substrate carrier with a substrate, transferring and treating substrate in vacuum treatment plant, removing and recycling substrate

摘要

Method for reducing gas load of substrate carriers with vacuum processes, comprises repeatedly equipping a substrate carrier with at least one substrate, transferring into a vacuum treatment plant, treating the substrate in the vacuum treatment plant, removing the substrate carriers from the vacuum treatment plant, recycling the substrate, where the substrate carrier is conducted and/or heated during the recycle by a medium preventing the gas uptake.