A FRICTION MEMBER COATED DIAMOND PHASE CARBON FILM DOPED WITH SILICON AND THE MANUFACTURING METHOD FOR THE SAME

摘要

A frictional member having diamond-phase carbon thin film coating doped with silicon on friction surface of a crude material and a process for manufacturing the same are provided for achieving excellent lubrication of the member, thereby increasing durability of mechanical parts. The member is produced by the process comprising steps of: placing a crude material(1) on a base plate(130) after washing the material with deionized water; etching a surface of the crude material to be coated by operating an ion gun(110) for 10-40 minutes while applying a bias voltage of -10 to -1000V on the plate(130) and feeding argon gas from a gas feeding part(150) into a chamber(100); a pre-vapor deposition for forming a silicon layer over the crude material(1) using a sputtering gun(120) under argon gas and at 0.5-2m Torr pressure; and a vapor deposition for coating the crude material(1) with a diamond-phase carbon thin film doped with silicon using the ion gun(100) under hydrocarbon and Si containing gas at 10-100m Torr to generate carbon plasma.