THIN FILM FORMATION METHOD, THIN FILM FORMATION EQUIPMENT, METHOD FOR MANUFACTURING ORGANIC ELECTROLUMINESCENCE DEVICE, ORGANIC ELECTROLUMINESCENCE DEVICE, AND ELECTRONIC APPARATUS

摘要

The invention relates to providing a thin film formation method which can carry out various kinds of patterning deposition such as a mask vapor deposition with high precision and correctly, and a thin film formation equipment, and furthermore, to provide a method of manufacturing an organic electroluminescence device using the thin film formation method, an organic electroluminescence device, and an electronic apparatus having the organic electroluminescence device. A thin film formation method that arranges a mask M between a substrate G and a material source 1 and forms the material of the material source 1 as thin film in the substrate G, comprises: a substrate contacting process to contact the mask M and the substrate G; a gap measurement process to measure a gap between the mask M and the substrate G; and a thin film formation process to form the thin film according to the measurement result in the gap measurement process. IMAGE