A process for the preparation of a temperature controller of a more layer contact coating, in particular a temperature controller, which can be more layer contact metallization

摘要

A process for the preparation of a temperature controller, which can be more layer contact coating (4) on a semiconductor material (2), comprising the steps of:(a) applying a mask layer (3) to the semiconductor material (2);(b) forming a window (31) in the mask layer (3), wherein the the window (31) limiting surfaces of the mask layer (3) an acute angle with the surface to be coated of the semiconductor material (2), in such a way that the window (31) for the semiconductor material on its side facing towards (2) has a larger cross-section than the semiconductor material on its side facing away from (2);(c) applying a contact metal layer (4) to the semiconductor material (2) in the window (31);(d) application of a terminal layer (6) and / or a barrier layer (5) on or over the contact metal layer (4);(e) lifting of the on the mask layer (3) of the contact metal layer (4) and terminal layer (6) by means of removal of the mask layer (3);characterized in thatin method step (c) the application of the contact metal layer (4) by means of a directed deposition process is carried out; and..