Probe station for measuring characteristics of silicon wafer, includes chuck for supporting device under test and platen for supporting probe for testing DUT

摘要

A chuck (102) supports the device under test (104). An upper platen (106) supports the electrical probes (110) for testing the device under test (DUT). A lower pattern (114) supports the optical probe (116), which are aligned with edge of device under test during testing of DUT.