A new TE01δ test probe with proper transmission factor is fabricated for the measurement of surface resistance of high temperature superconductor (HTS) thin film. Coupling holes instead of coupling loops are used in the probe for its easier machining and relatively low loss. Two 6 mm × 3 mm × 8 mm dielectric waveguides, one side of them is coated by silver, are used for coupling. The measurement result of S21 agrees well with the simulation because the size of the probe can be rigidly controlled by machine. The microwave surface resistance of four YBCO/MgO films are measured at 77 K and 12 GHz and scaled to 10 GHz according to the f 2 rule. The average surface resistance of four HTS thin films is 0.38 mΩ, the standard deviation and relative standard deviation of one single HTS thin film are 0.009 mΩ and 2.4%, respectively.
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