CONTROL METHOD OF GONIOMETER, GONIOMETER, FOUR-AXIS GONIOMETER AND X-RAY DIFFRACTION DEVICE

摘要

PROBLEM TO BE SOLVED: To detect the interference with an obstacle with high precision and to widen the operation range of each rotary part to realize rotary operation high in a degree of freedom.;SOLUTION: The angles of rotation of a ω turntable 13 and a κ turntable 14 are respective detected, and a rotatable angle region and a rotation control angle region are relatively preset with respect to the respective turntables 13 and 14. Then, the respective detected angle-of-rotation data are compared with the preset rotatable angle region and the rotation control angle region to control the rotary operation of the respective turntables 13 and 14 being detection targets on the basis of the comparison result.;COPYRIGHT: (C)2006,JPO&NCIPI