X-RAY DIFFRACTION GONIOMETER AND X-RAY DIFFRACTION METHOD

摘要

PURPOSE:To enable a special highly accurate measurement in addition to normal diffraction measurement by use of theta - 2theta scanning, by enabling rough rotation and fine rotation of a sample bed and rough rotation and fine rotation of an X-ray detector. CONSTITUTION:A secondary rotary shaft 11 is held to a base 1 by a bearing 10. A first fine rotation drive mechanism 31 which will be explained hereinbelow is provided at the forward end of a sufficiently long first arm 15 which is fixed to the second rotary shaft 11, perpendicular the axis thereof. That is, the first arm 15 may be finely rotated, relative to the base 1, and accordingly, the second rotary shaft 11 may be finely rotated, relative to the base 1. A fourth rotary shaft 2 is held to the base 1 by a bearing 2. A second fine rotation drive mechanism 32 is provided at the forward end of a sufficiently long second arm 30 which is fixed to the fourth rotary shaft 3, perpendicular to the axis thereof. That is, the second arm 30 may be rotated finely, relative to the base 1, and accordingly, the fourth rotary shaft 3 may be also finely rotated, relative to the base 1.