Electrostatic drive type MEMS device and manufacturing method thereof, optical MEMS element, light modulation element, GLV device, laser display, and MEMS devices

摘要

PROBLEM TO BE SOLVED: To flatten a surface of a drive side electrode of an electrostatic drive type MEMS element.;SOLUTION: A substrate side electrode 33 and a beam 35 disposed opposite to the substrate side electrode 33 and having a drive side electrode 38 driven with an electrostatic attraction or an electrostatic repulsion acting from the substrate side electrode 33 are provided. The substrate side electrode 33 is made of a conductive semiconductor region with impurities introduced thereinto in a semiconductor substrate 32.;COPYRIGHT: (C)2003,JPO