CONTACT PROBE, PRODUCTION TECHNIQUE THEREOF AND USAGE THEREOF, AND PROBE CARD EQUIPPED WITH THE CONTACT PROBE AND INSPECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a contact probe having small stress generated in the electrodes.;SOLUTION: The contact probe is equipped with an apex part for contacting it with a plane to be measured, a support part for performing support and electrical linkage, and a spring part linking the apex part to the support part. The apex part has an abutting part, contacting the plane to be measured at its further apex and a first slope and a second slope placed pinching the abutting part; while the apex part, the support part and the spring part are configured so as to displace to the side of the first slope in relation to the abutting part, while the abutting part abuts against the plane to be measured owing to elastic deformation produced in the spring part, when the support part is fixed and the abutting part is forced to press against the plane to be measured. Of the abutting part, thickness W is not less than 5 μm and not more than 30 μm and the pressure, when pressing against the plane to be measured is not less than 0.1 GPa and not more than 5 GPa.;COPYRIGHT: (C)2006,JPO&NCIPI