CONTACT PROBE, MANUFACTURING METHOD AND USING METHOD THEREFOR, PROBE CARD PROVIDED WITH THE CONTACT PROBE, AND INSPECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent an electrode and a dielectric substance located directly below the electrode from being damaged at scrubbing.;SOLUTION: This contact probe is provided with a tip part contacting with a measured face, a support part for support and electrical connection, and a spring part for connecting the tip part to the support part. The tip part, the support part and the spring part are constituted to to be displaced on the measured face by elastic deformation generated in the spring part, under the condition where the tip part abuts against the measured face, when the support part is fixed to press the tip part onto the measured face. The tip part is formed into a projected shape, oriented toward the measured face, and has a side face comprising a triangular and/or trapezoidal plane, and is provided with an abutting angled part directly contacting with the measured face in a tip thereof. The abutting angled part has roundness having 1μm or larger to 30μm or smaller for the curvature radius R, and the pressure, when pressing it against the measured face is 0.1GPa or higher to 5GPa or lower.;COPYRIGHT: (C)2006,JPO&NCIPI