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ANODIC BONDER, ANODIC BONDING METHOD AND METHOD OF MANUFACTURING ACCELERATION SENSOR
ANODIC BONDER, ANODIC BONDING METHOD AND METHOD OF MANUFACTURING ACCELERATION SENSOR
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机译:阳极结合剂,阳极结合方法和制造加速度传感器的方法
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摘要
An anodic bonding apparatus includes a first electrode and a second electrode. The first electrode has a first surface, and the second electrode has a second surface facing the first surface. The first surface includes a first central area; a first substrate placing area for placing a laminated substrate; and a first peripheral area surrounding the first substrate placing area. The second surface includes a second central area corresponding to the first central area; a second substrate placing area surrounding the second central area; and a second peripheral area corresponding to the first peripheral area and surrounding the second substrate placing area. Further, the second electrode includes a curved portion curved toward the first electrode, so that a distance between the first central area and the second central area becomes smaller than a distance between the first peripheral area and the second peripheral area.
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