Silicon optoelectronic device manufacturing method and Silicon optoelectronic device manufactured by thereof and Image input and/or output apparatus applied it

摘要

Provided are a method of manufacturing a silicon optoelectronic device, a silicon optoelectronic device manufactured by the method, and an image input and/or output apparatus having the silicon optoelectronic device. The method includes: preparing an n-type or p-type silicon-based substrate (1); forming a polysilicon in one or more regions of the surface of the substrate (15,25,35); oxidizing the surface of the substrate where the polysilicon is formed, to form a silicon oxidation layer on the substrate, and forming a microdefect flection pattern (51,55) at the interface between the substrate and the silicon oxidation layer, wherein the microdefect flection pattern is formed by the oxidation accelerated by oxygen traveling through boundaries of the grains in the polysilicon; exposing the microdefect flection pattern by etching the silicon oxidation layer; and forming a doping region by doping the exposed microdefect flection pattern with a dopant of the opposite type to the substrate.