BOLOMETER STRUCTURE WITH HIGH RESPONSIVITY

摘要

A bolometer structure is provided to acquire a high responsivity by connecting a bolometer resistor to a signal leg only in a signal read process using the warpage of an upper electrode. A bolometer structure comprises a substrate(50), a lower electrode(51) on the substrate, an upper electrode(52) spaced apart from the lower electrode, a bolometer resistor(53) spaced apart from the upper electrode, a first support body(70) for supporting the upper electrode at a first predetermined portion between the upper and lower electrodes, a second support body(80) for supporting the bolometer resistor at a second predetermined portion between the bolometer resistor and the upper electrode, and a signal leg(60) for being selectively connected with the bolometer resistor. The bolometer resistor is electrically connected with the signal leg due to the warpage of the upper electrode in a predetermined voltage state.