Effect of the surface step structures on the responsivity of the MEMS terahertz bolometers

摘要

We reported a room temperature, all electrical driving and detecting, very sensitive thermometer using a GaAs doubly clamped microelectromechanical (MEMS) beam resonator for bolometer applications.Whenthe MEMS beam is heated by THz radiation,a compressive strain is generated in the beam due to thermal expansion and a