CONTINUOUS TYPE HEAT TREATMENT METHOD AND CONTINUOUS TYPE HEAT TREAT FURNACE

摘要

PROBLEM TO BE SOLVED: To provide an economical heat treatment method with which heat treatment can be evenly, stably, speedily and continuously conducted without irregularity for a glass substrate of a large area and the like that can be adopted for various processing conditions and in which a heat treatment furnace used for executing the method is compact and to provide the heat treatment furnace.;SOLUTION: In the continuous type heat treatment method and the heat treatment furnace for conducting the method, two or more batch type heating chambers heated to different setting temperatures and arranged in series are used to conduct heat treatment for an object to be heated which has a surface area approximately same as or smaller than the surface area in the heating chambers while the object to be heated is sequentially moved to the respective heating chambers until it reaches an intended temperature. The setting temperature of each heating chamber is determined so that a heat treatment time for the object to be heated in each heating chamber becomes same by using radiant heat transfer quantity in advance and the heat treatment is carried out while the object to be heated is sequentially moved from the heating chamber of which setting temperature is low.;COPYRIGHT: (C)2007,JPO&INPIT