METHOD FOR FORMING FLUORINATED DIAMONDLIKE CARBON THIN FILM, AND FLUORINATED DIAMONDLIKE CARBON THIN FILM OBTAINED THEREBY

摘要

PROBLEM TO BE SOLVED: To provide a method for efficiently forming a highly hard diamondlike carbon thin film having low surface energy useful as a surface protective film for various purposes and excellent releasing and sliding characteristics with a uniform thickness in a larger area.;SOLUTION: This method forms a fluorinated diamondlike carbon thin film by forming a gas containing a fluorinated carbon hydride compound into plasma by an ionizing current, and sucking, colliding and sticking generated ions on a member on which a film is formed.;COPYRIGHT: (C)2007,JPO&INPIT