首页> 外国专利> Fabrication of wire bond pads over underlying active devices, passive devices and/or dielectric layers in integrated circuits

Fabrication of wire bond pads over underlying active devices, passive devices and/or dielectric layers in integrated circuits

机译:在集成电路中底层有源器件,无源器件和/或介电层上制造引线键合焊盘

摘要

A wire connection structure for an integrated circuit (IC) die includes a semiconductor wafer with an active device and/or a passive device. One or more dielectric layers are arranged adjacent to the active and/or passive device. One or more metal interconnect layers are arranged adjacent to the active and/or passive device. A contact pad is arranged in an outermost metal interconnect layer. A passivation layer is arranged over the outermost metal interconnect layer and includes at least one passivation opening that exposes the contact pad. A bond pad is arranged over the passivation layer and the active and/or passive device and is connected to the contact pad through the passivation opening. Formation of the bond pad does not damage the active and/or passive device.
机译:用于集成电路(IC)管芯的电线连接结构包括具有有源器件和/或无源器件的半导体晶片。一个或多个介电层邻近有源和/或无源器件布置。一层或多层金属互连层邻近有源和/或无源器件布置。接触垫布置在最外部的金属互连层中。钝化层布置在最外层金属互连层上方,并且包括至少一个钝化开口,该钝化开口暴露出接触垫。焊盘布置在钝化层和有源和/或无源器件上方,并通过钝化开口连接到接触焊盘。结合垫的形成不会损坏有源和/或无源器件。

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