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Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby

机译:位移设备,光刻设备,设备制造方法以及由此制造的设备

摘要

A displacement apparatus comprising a first part and a second part, which can be displaced relative to each other in first and second different directions. The apparatus being suitable for use in a lithographic apparatus for positioning the mask holder with respect to the projection beam and for positioning the wafer substrate table with respect to the patterned beam. The first part comprises a first and second coil system in which an alternating current is provided by a power supply. The second part comprises a conductive platen which is disposed in a zone in which a magnetic field is induced when power is supplied to the coil systems. The coil system and platen are arranged with respect to each other so that when currents are passed through the coils, a magnetic field induced in the platen causes displacement between the platen and the coils in the first and second different directions.
机译:一种移位装置,包括第一部分和第二部分,它们可以在第一和第二不同方向上相对于彼此移位。该设备适合用于光刻设备中,以相对于投射束定位掩模保持器并且相对于图案化束定位晶片衬底台。第一部分包括第一和第二线圈系统,其中通过电源提供交流电。第二部分包括导电压板,该导电压板布置在当向线圈系统供电时在其中感应磁场的区域中。线圈系统和压板相对于彼此布置,使得当电流流过线圈时,在压板中感应的磁场导致压板和线圈之间在第一和第二不同方向上发生位移。

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