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Multi-axis acceleration sensor with magnetoresistive detectors of the spin valve type
Multi-axis acceleration sensor with magnetoresistive detectors of the spin valve type
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机译:带旋转阀类型磁阻检测器的多轴加速度传感器
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摘要
An acceleration sensor includes a housing member (20), first and second magnetic field generation members with weights (22a-22d), a spring member (21) with a fulcrum (26) attached to the housing member (20), for supporting the first and second magnetic field generation members with weights (22a-22d) and for displacing the first and second magnetic field generation members with weights (22a-22d) when an external force with components in first and second axis directions that are perpendicular to each other is applied, and first and second magnetic field detection sensors (23,24) attached to the housing member (20) to face the first and second magnetic field generation members with weights (22a-22d), respectively. Each of the first and second magnetic field detection sensors (23,24) has two pairs of multi-layered magnetoresistive effect elements (23a-23d,24a-24d) each including a magnetization fixed layer and a magnetization free layer. The magnetization fixed layer is magnetically fixed along a direction parallel to a direction of displacement of the first and second magnetic field generation members with weights (22a-22d). One pair of the multi-layered magnetoresistive effect elements (23a,23b) in the first magnetic field detection sensor (23) and one pair of the multi-layered magnetoresistive effect elements (24b,24a) in the second magnetic field detection sensor (24) are connected in full-bridge configuration. The other pair of the multi-layered magnetoresistive effect elements (23c,23d) in the first magnetic field detection sensor (23) and the other pair of the multi-layered magnetoresistive effect elements (24c,24d) in the second magnetic field detection sensor (24) are connected in full-bridge configuration.
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