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Multi-axis acceleration sensor with magnetoresistive detectors of the spin valve type

机译:带旋转阀类型磁阻检测器的多轴加速度传感器

摘要

An acceleration sensor includes a housing member (20), first and second magnetic field generation members with weights (22a-22d), a spring member (21) with a fulcrum (26) attached to the housing member (20), for supporting the first and second magnetic field generation members with weights (22a-22d) and for displacing the first and second magnetic field generation members with weights (22a-22d) when an external force with components in first and second axis directions that are perpendicular to each other is applied, and first and second magnetic field detection sensors (23,24) attached to the housing member (20) to face the first and second magnetic field generation members with weights (22a-22d), respectively. Each of the first and second magnetic field detection sensors (23,24) has two pairs of multi-layered magnetoresistive effect elements (23a-23d,24a-24d) each including a magnetization fixed layer and a magnetization free layer. The magnetization fixed layer is magnetically fixed along a direction parallel to a direction of displacement of the first and second magnetic field generation members with weights (22a-22d). One pair of the multi-layered magnetoresistive effect elements (23a,23b) in the first magnetic field detection sensor (23) and one pair of the multi-layered magnetoresistive effect elements (24b,24a) in the second magnetic field detection sensor (24) are connected in full-bridge configuration. The other pair of the multi-layered magnetoresistive effect elements (23c,23d) in the first magnetic field detection sensor (23) and the other pair of the multi-layered magnetoresistive effect elements (24c,24d) in the second magnetic field detection sensor (24) are connected in full-bridge configuration.
机译:加速度传感器包括:壳体构件(20),具有配重(22a-22d)的第一和第二磁场产生构件,具有附接至壳体构件(20)的支点(26)的弹簧构件(21),用于支撑壳体(20)。第一和第二磁场产生构件具有配重(22a-22d),并且当外力在第一和第二轴方向上具有彼此垂直的分量时,用于使第一和第二磁场产生构件具有配重(22a-22d)移位施加有第一和第二磁场检测传感器(23,24),该第一和第二磁场检测传感器(23,24)分别与配重(22a-22d)面对第一和第二磁场产生部件。第一和第二磁场检测传感器(23,24)中的每一个具有两对多层磁阻效应元件(23a-23d,24a-24d),每对包括磁化固定层和磁化自由层。磁化固定层沿着与第一和第二磁场产生构件的位移方向平行的方向被磁性固定(22a-22d)。第一磁场检测传感器(23)中的一对多层磁阻效应元件(23a,23b)和第二磁场检测传感器(24)中的一对多层磁阻效应元件(24b,24a) )以全桥配置连接。第一磁场检测传感器(23)中的另一对多层磁阻效应元件(23c,23d)和第二磁场检测传感器中的另一对多层磁阻效应元件(24c,24d) (24)以全桥配置连接。

著录项

  • 公开/公告号EP1790987A1

    专利类型

  • 公开/公告日2007-05-30

    原文格式PDF

  • 申请/专利权人 TDK CORPORATION;

    申请/专利号EP20060124696

  • 发明设计人 KUWAHARA TSUNEO;SHOJI SHIGERU;

    申请日2006-11-23

  • 分类号G01P15/105;G01P15/18;G01R33/09;

  • 国家 EP

  • 入库时间 2022-08-21 20:43:43

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