BEVEL HEAD OF SPIN ETCHER CAPABLE OF PROCESS TIME REDUCTION AND METHOD USING THE SAME

摘要

A bevel head of a spin etcher for reducing a process time and a method using the same are provided to reduce the process time and enhance productivity by adding a deionized water injection head function to an inside of a bevel head. A bevel head of a spin etcher includes a bevel head body(104) for injecting chemicals onto a wafer(103) loaded on a wafer chuck(102). A chemical supply nozzle(106) is formed at a sidewall of the bevel head body to supply the chemicals to an edge of the wafer. The bevel head body is connected with a first nitrogen gas supply line(109), a chemical supply line(108), and a second nitrogen gas supply line(114) and a deionized water supply line(112).