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INTEGRATED CIRCUIT DESIGN METHOD, DESIGN SUPPORT PROGRAM USED IN THE INTEGRATED CIRCUIT DESIGN METHOD, AND INTEGRATED CIRCUIT DESIGN SYSTEM

机译:集成电路设计方法,用于集成电路设计方法的设计支持程序以及集成电路设计系统

摘要

[PROBLEMS] To provide an integrated circuit design method, a design support program used in the integrated circuit design method, and an integrated circuit design system which realize a combined method of the photo mask-less experimental manufacture method and the photo mask experimental manufacture method having the advantage of the photo mask-less experimental manufacture method which can perform experimental manufacture without producing a photo mask and the advantage of the photo mask experimental manufacture method enabling direct use of the pattern information used in the experimental manufacture in the mass production. [MEANS FOR SOLVING PROBLEMS] In a common design environment usable for a photo mask-less process for creating an integrated circuit without using a photo mask according to pattern information and a photo mask process for creating an integrated circuit by using a photo mask according to the pattern information, according to the pattern information for experimental manufacture corresponding to the photo mask-loess process and the photo mask process, an integrated circuit is experimentally manufactured without using a photo mask, evaluated, improved if necessary, and formally converted without adding improvement to the common pattern information, thereby generating a photo mask for mass production and using it.
机译:[问题]提供一种集成电路设计方法,用于该集成电路设计方法的设计支持程序以及一种集成电路设计系统,其实现无光掩模实验制造方法与光掩模实验制造方法的组合方法。具有无需制造光掩模就可以进行实验制造的无光掩模实验制造方法的优点,以及能够在批量生产中直接使用在实验制造中使用的图案信息的光掩模实验制造方法的优点。 [用于解决问题的手段]在可用于不使用光掩模的,不使用根据图案信息的光掩模来创建集成电路的无光掩模工艺的通用设计环境中,以及用于通过使用根据本发明的光掩模的用于创建集成电路的光掩模工艺的通用设计环境中。根据所述图案信息,根据与光掩模黄土工艺和光掩模工艺对应的用于实验制造的图案信息,在不使用光掩模的情况下对集成电路进行实验制造,对其进行评估,必要时进行改进,并在不增加改进的情况下进行正式转换根据通用图案信息,生成用于批量生产的光掩模并使用它。

著录项

  • 公开/公告号KR20060129011A

    专利类型

  • 公开/公告日2006-12-14

    原文格式PDF

  • 申请/专利权人 JAPAN SCIENCE AND TECHNOLOGY AGENCY;

    申请/专利号KR20067016122

  • 发明设计人 KAWAMOTO HIROSHI;

    申请日2006-08-10

  • 分类号H01L21/027;H01L21/02;

  • 国家 KR

  • 入库时间 2022-08-21 20:42:20

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