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method for manufacturing a disc for a phasenschiebermaske and phasenschiebermaske
method for manufacturing a disc for a phasenschiebermaske and phasenschiebermaske
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机译:用于制造阶段性掩模的光盘的方法和阶段性掩模的光盘
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摘要
In a phase shift mask blank comprising a transparent substrate and a phase shift film thereon, after the phase shift film is formed on the substrate, it is surface treated with ozone water having an ozone concentration of at least 1 ppm. The resulting phase shift film is of quality in that it experiences minimized changes of phase difference and transmittance upon immersion in chemical liquid during subsequent mask cleaning step or the like.
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