Three-dimensional electronic module, has conducting element and bumps made of material having determined hardness, where hardness of material of element is lower than hardness of material of bumps so that bumps penetrate in element

摘要

The module has a stack (100) of two slices (10, 30), where the slice (10) has a set of electrically conducting bumps on its face. The slice (30) comprises an electrically insulating material zone (61) passing through the thickness of the slice (30) and an electrically conducting element (3) passing through the slice (30) in the zone. The conducting element and the bumps are made of material having a determined hardness. The hardness of the material of the element (3) is lower than the hardness of the material of the bumps so that the bumps penetrate in the conducting element.