METHOD OF FORMING LASER LIGHT BEAM, AND LASER CRYSTALLIZATION APPARATUS FOR CRYSTALLIZING THIN-FILM

摘要

PROBLEM TO BE SOLVED: To easily shape the beam shape of laser light with reliability.;SOLUTION: In a method of shaping a laser light beam, laser light emitted from a laser light source is shaped in two or more directions through a plurality of homogenizers which include a plurality of cylindrical lenses and have different shaping directions. In this method, a side of a rectangular beam incident on the homogenizers is inclined so as to have an angle difference of 1° to 89° with respect to the main cut surface directions of the cylindrical lenses, so that the laser light beam passing through the homogenizers is shaped. Thus it is possible to easily and reliably shape the laser light beam having passed through the homogenizers and apply this method to the manufacturing of a high-quality crystallized thin film.;COPYRIGHT: (C)2008,JPO&INPIT