WORKING DEVICE AND WORKING METHOD FOR MATERIAL USING UV RAY OR LIGHT AT SHORTER WAVELENGTH THAN UV RAY

摘要

PROBLEM TO BE SOLVED: To provide a working device and a working method by which a shape whose working amount is different in each portion can be easily worked in one exposure.;SOLUTION: The device is equipped with an SR (synchrotron radiation) light source that emits x-rays of SR light, an X-ray mask 32 having a transmission portion in a predetermined shape that transmits the X-rays emitted from the SR light source, and an exposure stage that relatively moves the X-ray mask and a material and relatively vibrates the X-ray mask and the material so as to vibrate a region where the material is irradiated with the X-rays transmitting through a transmission aperture. The X-ray mask 32 has seven transmission apertures 103A to 103G, and all of the apertures are separated by concentric boundaries. When the X-ray mask 32 is moved in directions X and Y in an amplitude d, uneven density distribution is generated in the X-rays irradiating the material per unit time, which is used to work a three-dimensional shape having partially different working amounts in the one exposure.;COPYRIGHT: (C)2008,JPO&INPIT