HYPERBRANCHED POLYMER SYNTHESIS METHOD, HYPERBRANCHED POLYMER, RESIST COMPOSITION, SEMICONDUCTOR INTEGRATED CIRCUIT, AND SEMICONDUCTOR INTEGRATED CIRCUIT PRODUCTION METHOD

摘要

PROBLEM TO BE SOLVED: To stably prepare a hyperbranched polymer of a desired molecular weight without markedly increasing its molecular weight due to the progress of its intermolecular crosslinking.;SOLUTION: The method is one for synthesizing a hyperbranched polymer through the living radical polymerization of a monomer in the presence of a metallic catalyst, wherein the living radical polymerization is followed by the removal of the metallic catalyst from the reaction system containing the hyperbranched polymer synthesized by the living radical polymerization, and the removal of the metallic catalyst is followed by the removal of the solvent from the reaction system by drying at 10-70°C.;COPYRIGHT: (C)2008,JPO&INPIT