METHOD FOR SYNTHESIS OF HYPERBRANCHED POLYMER, HYPERBRANCHED POLYMER, RESIST COMPOSITION, SEMICONDUCTOR INTEGRATED CIRCUIT, AND METHOD FOR PRODUCTION OF SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

The object is to produce a hyperbranched polymer having a desired molecular weight while keeping a high degree of branching in a stable manner. In the synthesis of a hyperbranched polymer by the living radical polymerization of a monomer in the presence of a metal catalyst, at least one of the following steps (1) and (2) is conducted: (1) at least one compound represented by R1-A or R2-B-R3 is added [wherein R1 represents a hydrogen, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, or an aralkyl group having 7 to 10 carbon atoms; A represents a cyano group, a hydroxy group, or a nitro group; R2 and R3 independently represent a hydrogen, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an aralkyl group having 7 to 10 carbon atoms, or a dialkylamino group having 2 to 10 carbon atoms; and B represents a carbonyl group or a sulfonyl group]; and (2) the amount of the monomer added to a reaction system per one divided portion is less than the total amount of the monomer to be added to the reaction system.