It is low, preparation manner null of the nano component which uses high resolution patterning manner and the aforementioned manner which utilize the energy electron beam

摘要

Low the high resolution patterning method of using the energy electron beam and production method of the nano- element which uses the aforementioned high resolution pattern are offered. The aforementioned method, substitution or includes with stage and the stage which structure changes the imine connection in the aforementioned aromatic imine molecular layer selectively and the aforementioned aromatic imine molecular layer adding water is disassembled the stage which form the aromatic imine molecular layer which possesses the terminal ring of non substitution on the baseplate.