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Method for Rapid Liquid Phase Deposition of Crystalline Si Thin Films on Large Glass Substrates for Solar Cell Applications
Method for Rapid Liquid Phase Deposition of Crystalline Si Thin Films on Large Glass Substrates for Solar Cell Applications
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机译:在太阳能电池应用的大型玻璃基板上快速液相沉积结晶硅薄膜的方法
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摘要
A method for liquid phase deposition of crystalline silicon thin films, and a high efficiency solar cell that is fabricated using crystalline silicon thin film technology, has the performance of a crystal silicon solar cell, but at the cost level per unit area of a solar cell fabricated using an amorphous silicon thin film. The crystal thin film uses only 10% or less of the amount of silicon used in a wafer-based solar cell. Because of the maturity of silicon technology in semiconductor industry, this approach not only enables high volume, automated production of solar cells on a very large, low-cost substrate, but also increases the area throughput up to 10000 cm2/min from 942 cm2/min in case of CZ crystal growth.
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机译:晶体硅薄膜的液相沉积方法以及使用晶体硅薄膜技术制造的高效太阳能电池具有晶体硅太阳能电池的性能,但是以太阳能电池的单位面积的成本水平使用非晶硅薄膜制造。晶体薄膜仅使用基于晶片的太阳能电池中硅的量的10%或更少。由于半导体工业中硅技术的成熟,这种方法不仅可以在非常大的低成本衬底上实现大批量,自动化的太阳能电池生产,而且还可以将面积吞吐量提高到10000 cm 2 CZ晶体生长时,从942 cm 2 Sup> / min开始的Sup> / min。
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