Method for preparing nanocomposite ZnO-SiO2 fluorescent film by sputtering

摘要

A method for preparing nanocomposite ZnO—SiO₂ fluorescent thin film by magnetron sputtering is proposed. ZnO is formed as nano-sized crystalline particles uniformly dispersed in the amorphous SiO₂ matrix after the sputtering. The photoluminescence (PL) revealed that the spectra consisted of three emission bands, violet, blue and green-yellow and the mixed light turns out to be white. By adjusting the ZnO doping concentration, the relative emission intensities of the three bands can be modulated so that white light with different color temperatures can be obtained. By the invention, the whole process comprised of only one single-layer deposition that can be applied on any substrate.