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Laser-based irradiation apparatus and method to measure the functional dose-rate response of semiconductor devices
Laser-based irradiation apparatus and method to measure the functional dose-rate response of semiconductor devices
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机译:基于激光的辐照设备和方法,用于测量半导体器件的功能剂量率响应
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摘要
A broad-beam laser irradiation apparatus can measure the parametric or functional response of a semiconductor device to exposure to dose-rate equivalent infrared laser light. Comparisons of dose-rate response from before, during, and after accelerated aging of a device, or from periodic sampling of devices from fielded operational systems can determine if aging has affected the device's overall functionality. The dependence of these changes on equivalent dose-rate pulse intensity and/or duration can be measured with the apparatus. The synchronized introduction of external electrical transients into the device under test can be used to simulate the electrical effects of the surrounding circuitry's response to a radiation exposure while exposing the device to dose-rate equivalent infrared laser light.
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