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Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposes
Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposes
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机译:用于优化边界以实现光学邻近校正(OPC)的碎片的方法和装置
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摘要
The present invention is directed to a method and apparatus for optimizing fragmentation of integrated circuit boundaries for optical proximity correction (OPC) purposes. The present invention may balance the number of vertices and the “flexibility” of the boundary and may recover fragmentation according to the process intensity profile along the ideal edge position to obtain the best decision for OPC.
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