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Copper electroplating liquid, pretreatment liquid for copper electroplating and method of copper electroplating
Copper electroplating liquid, pretreatment liquid for copper electroplating and method of copper electroplating
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机译:铜电镀液,铜电镀前处理液及铜电镀方法
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摘要
In filling fine via holes or trenches of the wiring (LSI) pattern formed on a semiconductor wafer, a copper electroplating is carried out by using a copper electroplating solution containing an azole or a silane coupling agent, or a copper electroplating is carried out after the immersion into a pretreatment solution containing an azole or a silane coupling agent. As illustratively shown above, the addition of a component having the action to inhibit the dissolution of copper to an electroplating solution or the pretreatment by a solution containing a component having the action to inhibit the dissolution of copper can inhibit the dissolution of a copper seed layer covering poorly, and thus can prevent the occurrence of defects such as voids and seams.
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