COPPER ELECTROPLATING LIQUID, PRETREATMENT LIQUID FOR COPPER ELECTROPLATING AND METHOD OF COPPER ELECTROPLATING

摘要

Copper electroplating liquid contains an azole or a silane coupling agent. Independent claims are also included for: (1) a pretreatment liquid for copper electroplating which contains an azole or a silane coupling agent; and (2) a copper electroplating method by immersing in a copper sulfate electroplating liquid containing an azole or a silane coupling agent, and copper sulfate, sulfuric acid, chlorine and additives as main components, for 1-60 (3-10) seconds.