BELT CONVEYOR TYPE ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION APPARATUS

摘要

A belt conveyor type APCVD machine is provided to prevent an injection holes from being clogged by etching solution and to exhaust remaining pollutants from a circulation belt by using an exhausting unit. A belt conveyor type APCVD(Atmospheric pressure chemical vapor deposition) machine has a plenum plate(300). The plenum plate sprays etching gas to a circulation belt(22) to eliminate pollutant from the circulation belt. The plenum plate has an exhausting unit to suck up the remaining etching gas, pollutants and etching by-products and eliminate. The exhausting unit has an exhausting hole(302b) and a secondary exhausting hole(304b). A plurality of an ejection holes(302a) spraying the etching gas, are formed at an ejection surface unit(302). The exhausting hole is formed at an upper surface of the ejection surface unit, and sucks up and eliminates the pollutant. The secondary exhausting hole is formed at the upper surface of an exhausting surface unit(304), and secondarily intakes and eliminates the pollutants.