HIGH-PURITY QUARTZ SILICA CRUCIBLE FOR PULLING LARGE-DIAMETER SINGLE-CRYSTAL SILICON INGOT ENABLING REDUCTION OF PINHOLE DEFECT IN LARGE-DIAMETER SINGLE-CRYSTAL SILICON INGOT

摘要

PROBLEM TO BE SOLVED: To provide a high-purity quartz silica crucible used for pulling a large-diameter single-crystal silicon ingot which enables to reduce pinhole defects in the large-diameter single-crystal silicon ingot.;SOLUTION: The high-purity quartz silica crucible used for pulling a large-diameter single-crystal silicon ingot comprises a double layered structure having an outer layer of high-purity amorphous quartz silica with a bubble content of 1 to 10% and a purity of 99.99% or higher, and an inner layer of high-purity amorphous quartz silica with a bubble content of 0.6% or less and a purity of 99.99% or higher, wherein an inner surface of the quartz silica crucible at least between an ingot-pulling start line and an ingot-pulling end line of the silicon melt surface has a longitudinal section of the inner surface shaped into a waveform, and a multi ring-groove patterned face constituted by ring grooves having a depth of 0.5-2 mm and a width of 10-100 mm.;COPYRIGHT: (C)2009,JPO&INPIT