On the Structural Perfection of Large-Diameter Silicon Carbide Ingots

摘要

4H-silicon carbide ingots with high structural perfection have been grown by the modified Lely method (LETI method) on 100-mm-diameter seeds. Using our experimental data and theoretical analysis, we have systematized the key factors responsible for the degradation of the crystal structure of the ingots during the growth process. The formation of parasitic polytype inclusions in the early stages of growth has been shown to lead to the formation of antiphase boundaries and a mosaic substructure in the ingot.