Substantially oxygen and nitrogen in the ashing method of the baseplate by the plasma which is not included, oxygen kind and/or the method of observing nitrogen kind

摘要

Substantially oxygen and nitrogen oxygen and/or the method of observing the density of nitrogen usually, includes the process which observes the plasma which uses optical radiation in the ashing method by the plasma which is not included. Relation can the quantity of oxygen and the nitrogen which exist in the above-mentioned plasma sufficiently oxygen and the nitrogen which exist the oxygen which exists in the kind which differs and/or nitrogen low by being density in the plasma, attach to measurement and mutual. The processing which is called this effective detection , very small amount of oxygen kind and nitrogen kind originating in existence, nitrogen and/or is something which observes the fluctuation of the spectrum which it is related to the kind other than oxygen uniquely, 1/1000000 order, latently at sensitivity of 1/10000000000 order, oxygen and/or it is used in order to decide the quantity of nitrogen quantitatively.