METHOD FOR PRODUCING GALLIUM HYDRIDE GAS AND METHOD FOR PRODUCING GALLIUM NITRIDE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a gallium nitride crystal having a desired carrier concentration and fewer impurities without corroding a device for growing a crystal by accelerating a reaction of producing gallium hydride gas to contribute to improving a growth rate of the gallium nitride crystal and doping the gallium nitride crystal with oxygen as a n-dopant.;SOLUTION: Gallium hydride gas is generated by allowing gallium oxide 10 to react with hydrogen H2. The gallium hydride gas is made to react with a nitrogen-containing compound to grow a gallium nitride crystal. Oxygen derived from water molecules generating associated with generation of the gallium hydride gas is used as a n-dopant to dope the gallium nitride crystal in a process of growing the gallium nitride crystal.;COPYRIGHT: (C)2010,JPO&INPIT