Minienvironment system with load port with pod clamp unit, the pod clamp unit, the load port and pod

摘要

PROBLEM TO BE SOLVED: To provide a pod clamp unit, a load port corresponding to clamp unit, and its mini environment system, capable of surely maintaining fixation to a placement bench of a pod.;SOLUTION: The pod clamp unit 1, for fixing a pod on the placement bench, comprises a clamp part 3 disposed on the placement bench 119 for engaging with a first engaging part 31, provided on a lower surface of a pod body 106 and restricting the upward movement of the pod with respect to the placement bench 119; a restriction pin 53, disposed elevatably on the placement bench 119 for engaging with a second engaging part 51 provided on the lower surface of the pod body 106 for stopping the movement, in a direction where an engagement between the first engagement part 31 and the clamp part 3 is disengaged; and an elevation driving part 67 for making the restriction pin 53 hoist to the second engagement part 51.;COPYRIGHT: (C)2008,JPO&INPIT