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Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port
Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port
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机译:吊舱夹紧单元装载端口,配备吊舱夹紧单元和微型环境系统,包括吊舱和装载端口
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摘要
The invention is directed to a pod clamping unit for fixing a pod to a support table in a load port, the pod including a pod body capable of storing a wafer in the interior thereof and a lid, the load port having a pod opener that opens/closes the lid. The pod clamping unit includes a clamp portion that is provided on the support table and adapted to engage with a first engagement portion provided on a lower surface of the pod body to restrict upward movement of the pod relative to the support table, a restriction pin that is movable upwardly and downwardly relative to the support table and adapted to engage with a second engagement portion provided on the lower surface of the pod body to restrict movement of the pod in a disengaging direction that causes disengagement between the first engagement portion and the clamp portion, and a vertically driving portion that moves the restriction pin up to/down from the second engagement portion.
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