Pod cramping unit, load port equipped with pod cramping unit and mini-environment system including pod and load port

摘要

The invention is directed to a pod cramping unit for fixing a pod to a support table in a load port, the pod including a pod body capable of storing a wafer in the interior thereof and having an opening through which the wafer is to be taken out of/brought into the interior and a lid attached to the pod body to close/open the opening, the load port having a pod opener that opens/closes the lid to allow to bring the wafer out of/into the interior of the pod. The pod cramping unit includes a cramp portion that is provided on the support table and adapted to engage with a first engagement portion provided on a lower surface of the pod body to restrict upward movement of the pod relative to the support table, a restriction pin that is movable upwardly and downwardly relative to the support table and adapted to engage with a second engagement portion provided on the lower surface of the pod body to restrict movement of the pod in a disengaging direction that causes disengagement between the first engagement portion and the cramp portion, and a vertically driving portion that moves the restriction pin up to/down from the second engagement portion.